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Optoelectronic Materials
Optoelectronic Materials are Semiconductor Materials that have the ability to emit light. Silicon and Germanium are categorised as Indirect Bandgap Semiconductors and are inefficient light emitters / absorbers.
Direct Bandgap Semiconductors that possess strong absorption / emission characteristics are best suited for Optoelectronic applications such as:
- LEDs
- Laser Diodes
- Photo Diodes
- Solar Cells
Most widely used semiconductors for Optoelectronic device applications are compounds formed between elements of group III and group V of the periodic table also known as III-V Semiconductors.
Types of III-V Semiconductors include:
- Aluminium Nitride (AlN)
- Gallium Arsenide (GaAs)
- Gallium Nitride (GaN)
Indirect Bandgap Semiconductors such as Silicon Carbide (SiC) can also emit light with impurities added into the material. This process is known as doping.
Typical Specifications and Properties for Optoelectronic Materials
Aluminium Nitride (AlN) Substrates
AlN Material Properties | Typical Data | Unit of Measurement |
Colour | Grey – Beige | – |
Density | 3.25 – 3.30 | g/cm3 |
Surface Roughness | 0.3 – 0.6 | µm |
Bending Strength | 200 – 450 | MPa |
Modulus of Elasticity | 320 | GPa |
Vickers Hardness | 11 | GPa |
Fracture Toughness | 3 | MPa.m½ |
Coefficient of Thermal Expansion | 4.4 – 5.2 | 10-6 / K |
Thermal Conductivity | 120 – 230 | W/(m.K) |
Specific Heat | 720 | J/(kg.K) |
Dielectric Constant | 8.7 – 9.0 | – |
Dielectric Loss Factor | 0.2 | 10-3 |
Dielectric Strength | > 15 | kV /mm |
Volume Resistivity | ≥ 1014 | Ω.cm |
Silicon Carbide (SiC) Substrates
SiC Material Properties | Typical Data | Unit of Measurement |
Diameter | 50.8, 76.2, 100, 150 | mm |
Thickness | 330 – 350 | µm |
On-Axis Wafer Surface Orientation | (0001) ± 0.5° | Degrees |
Off-Axis Wafer Surface Orientation | 4 | Degrees |
Primary Flat Position | ± 5 | Degrees |
Primary Flat Length | 15.9 – 47.5 | mm |
Edge Exclusion | 1 – 3 | mm |
Bow | ≤ 25 – 40 | µm |
Warp | ≤ 25 – 60 | µm |
TTV | ≤ 15 | µm |
Resistivity | 0.015 – 0.028 | Ω.cm |
Total Useable Area | ≤ 90 | % |
Contamination | None | – |
Scratches | 3 – 8 | Wafer Size |
Cracks | None | – |
Chips | None | – |
Pinholes | None | – |
Pits | ≤ 20 | – |
Gallium Arsenide (GaAs) Semi-Conducting Substrates
GaAs Semi-Conducting Material Properties | Typical Data | Unit of Measurement |
Conductivity Type | P-Type / N-Type | – |
Dopant | Si – Zn / Si | – |
Diameter | 2”, 3”, 4” & 6” | Inches |
Thickness | 225 – 650 | µm |
Wafer Orientation | <1-0-0> ± 0.5 | Degrees |
Carrier Concentration | (0.2 – 3.5) x 1018 (0.5 – 4) x 1019 | cm-3 |
Resistivity | (1.2 – 9.9) x 10-3 | Ω.cm |
Etch Pit Density | < 500 – 3000 | cm-2 |
TTV (P/P) | ≤ 5 | µm |
DTTV (P/E) | ≤ 10 | µm |
Warp | ≤ 10 | µm |
Surface Finish | SSP / DSP | – |
Epitaxial Readiness | Yes | – |
Gallium Arsenide (GaAs) Semi-Insulating Substrates
GaAs Semi-Insulating Material Properties | Typical Data | Unit of Measurement |
Conductivity Type | Insulating | – |
Dopant | Undoped | – |
Diameter | 2”, 3”, 4” & 6” | Inches |
Thickness | 350 – 675 | µm |
Wafer Orientation | <1-0-0> ± 0.5 | Degrees |
Resistivity | 106 | Ω.cm |
Etch Pit Density | < 5000 | cm-2 |
TTV (P/P) | ≤ 5 | µm |
DTTV (P/E) | ≤ 10 | µm |
Warp | ≤ 10 | µm |
Surface Finish | FS SSP – BS FINE GRIND / DSP | – |
Epitaxial Readiness | Yes | – |
Gallium Nitride (GaN) on Sapphire Substrates
GaN on Sapphire Material Properties | Typical Data | Unit of Measurement |
Conductivity Type | P-Type / N-Type | – |
Dopant | Undoped – Si – Mg | – |
Diameter | 2”, 4” | Inches |
Thickness | 4 – 20 | µm |
Wafer Orientation | C / 0001 ± 0.5 | Degrees |
Carrier Concentration | < 5 x 1017 > 1 x 1018 > 6 x 1016 | cm-3 |
Resistivity | < 0.5 < 0.05 – 10 | Ω.cm |
Dislocation Density | < 5 x 1018 | cm-2 |
Substrate Structure | GaN on Sapphire | – |
Surface Finish | FS SSP – BS FINE GRIND / DSP | – |
Useable Surface Area | > 90% | – |
Gallium Nitride (GaN) Free Standing Substrates
GaN Free Standing Material Properties | Typical Data | Unit of Measurement |
Conductivity Type | N-Type / Semi-Insulating | – |
Dopant | Undoped – Ge – Fe | – |
Diameter | 2” | Inches |
Thickness | 350 | µm |
Wafer Orientation | C / 0001 ± 0.5 OFF | Degrees |
TTV | ≤ 15 μm | µm |
BOW | ≤ 20 μm | µm |
Resistivity | < 0.5 < 0.05 – 106 | Ω.cm |
Dislocation Density | 105 – 3 x 106 | cm-2 |
Surface Finish | FS RA < 0.2nm / BS Fine Ground | – |
Useable Surface Area | > 90% | – |
Sapphire High Purity Single Crystal Substrates
Sapphire Material Properties | Typical Data | Unit of Measurement |
Diameter | 2”, 4” & 6” | Inches |
Thickness | 430 – 1300 | µm |
Wafer Orientation | C-Plane to M-Plane / A-Plane | – |
Orientation Flat Length | 16 – 49 | mm |
Flat Orientation | A-Plane | – |
TTV | ≤ 5 – ≤ 15 | µm |
BOW | ≤ 5 – ≤ 30 | µm |
Warp | ≤ 10 – ≤ 40 | µm |
Surface Finish | FS RA < 3 A / BS Fine Ground | – |
Epitaxial Readiness | Yes | – |